Design and UV-LIGA microfabrication of an electro-statically actuated power relay
MICROSYSTEM TECHNOLOGIES ; 13 , 3-4 ; 279-286
2007-01-01
8 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Microfabrication of an electromagnetic power relay using SU-8 based UV-LIGA technology
British Library Online Contents | 2004
|Two-dimensional modeling of nickel electrodeposition in LIGA microfabrication
British Library Online Contents | 2004
|British Library Online Contents | 2006
|British Library Online Contents | 2003
|