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    Title :

    Design and UV-LIGA microfabrication of an electro-statically actuated power relay


    Contributors:
    Jeong, S. J. (author) / Wang, W. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 3-4 ; 279-286


    Publication date :

    2007-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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