Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Large area micro hot embossing of Pyrex glass with GC mold machined by dicing


    Contributors:
    Takahashi, M. (author) / Murakoshi, Y. (author) / Maeda, R. (author) / Hasegawa, K. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 3-4 ; 379-384


    Publication date :

    2007-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Modeling of large area hot embossing

    Worgull, M. / Kabanemi, K. K. / Marcotte, J. P. et al. | British Library Online Contents | 2008


    Mold filling analysis of an alignment structure in micro hot embossing

    Gomez, J. A. / Conner, G. T. / Chun, D. H. et al. | British Library Online Contents | 2014



    Micro structuring of inorganic glass by hot embossing of coated glass wafers

    Edelmann, J. / Worsch, C. / Schubert, A. et al. | British Library Online Contents | 2010


    A micro roller embossing process for structuring large-area substrates of laminated ceramic green tapes

    Shan, X. / Soh, Y. C. / Shi, C. W. et al. | British Library Online Contents | 2009