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    Title :

    Horizontal buried channels in monocrystalline silicon


    Contributors:
    Sagazan, O. (author) / Denoual, M. (author) / Guil, P. (author) / Gaudin, D. (author) / Bonnaud, O. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 10-11 ; 959-963


    Publication date :

    2006-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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