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    Title :

    A capacitance and optical method for the static and dynamic characterization of micro electro mechanical systems (MEMS) devices


    Contributors:
    Ferraris, E. (author) / Fassi, I. (author) / Masi, B. (author) / Rosing, R. (author) / Richardson, A. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 10-11 ; 1053-1061


    Publication date :

    2006-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83






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