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    Title :

    Elastic–plastic modeling of heat-treated bimorph micro-cantilevers


    Contributors:
    Lee, C. Y. (author) / Tsai, C. H. (author) / Chen, L. W. (author) / Fu, L. M. (author) / Chen, Y. C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 10-11 ; 979-986


    Publication date :

    2006-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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