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    Title :

    Fabrication and optimization of bimorph micro probes for the measurement of individual biocells


    Contributors:
    Cho, Y. H. (author) / Collard, D. (author) / Buchaillot, L. (author) / Conseil, F. (author) / Kim, B. J. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 1-2 ; 30-37


    Publication date :

    2005-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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