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    Title :

    Defect-free wet etching through pyrex glass using Cr/Au mask


    Contributors:
    Tay, F. E. (author) / Iliescu, C. (author) / Jing, J. (author) / Miao, J. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 10-11 ; 935-939


    Publication date :

    2006-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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