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    Title :

    Metallic micro displacement capacitive sensor fabricated by laser micromachining technology


    Contributors:
    Lai, Y. (author) / Bordatchev, E. V. (author) / Nikumb, S. K. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 8 ; 778-785


    Publication date :

    2006-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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