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    Title :

    Tribology of microsystems


    Contributors:
    Küster, R. (author) / Bandorf, R. (author) / Henke, C. (author) / Lüthje, H. (author) / Sick, J. H. (author) / Neumeister, C. (author) / Phataralaoha, A. (author) / Büttgenbach, S. (author) / Gatzen, H. H. (author) / Bräuer, G. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 7 ; 680-684


    Publication date :

    2006-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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