Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    A nondestructive automated defect detection system for silicon carbide wafers


    Contributors:
    Kubota, T. (author) / Talekar, P. (author) / Ma, X. (author) / Sudarshan, T. S. (author)

    Published in:

    Publication date :

    2005-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    006.42



    Automated Texturization of Silicon Wafers

    Chitre, S. / Snyder, C. / Jones, G. et al. | NTRS | 1985


    Defect detection in patterned wafers using anisotropic kernels

    Zontak, M. / Cohen, I. | British Library Online Contents | 2010


    Automatic surface defects detection on silicon wafers

    Miron, N. / Sporea, D.G. | IEEE | 1994


    Interferometric Imaging Technique for Nondestructive Evaluation of Optoelectronic Devices and Wafers

    IEEE; Lasers and Electro-Optics Society | British Library Conference Proceedings | 1994