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    Title :

    A nondestructive automated defect detection system for silicon carbide wafers


    Contributors:
    Kubota, T. (author) / Talekar, P. (author) / Ma, X. (author) / Sudarshan, T. S. (author)

    Published in:

    Publication date :

    2005-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    006.42



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