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    Title :

    A novel method for determining Young's modulus of thin films by micro-strain gauges


    Contributors:
    Pan, C. H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 2/3 ; 151-157


    Publication date :

    2005-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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