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    Title :

    Trench filling characteristics of low stress TEOS/ ozone oxide deposited by PECVD and SACVD


    Contributors:
    Chang, C. (author) / Abe, T. (author) / Esashi, M. (author)

    Published in:

    Publication date :

    2004-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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