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    Title :

    Heterodyne interferometer with two spatial-separated polarization beams for nanometrology


    Contributors:
    Wu, C. M. (author) / Lin, S. T. (author) / Fu, J. (author)

    Published in:

    OPTICAL AND QUANTUM ELECTRONICS ; 34 , 12 ; 1267-1276


    Publication date :

    2002-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    537.5





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