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    Title :

    Modeling acoustic agitation for enhanced development of PMMA resists


    Contributors:
    Nilson, R. H. (author) / Griffiths, S. K. (author) / Ting, A. (author)

    Published in:

    Publication date :

    2002-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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