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    Title :

    An electrostatic micro-actuator using LIGA process for a magnetic head tracking system of hard disk drives


    Contributors:
    Nakamura, S. (author) / Suzuki, K. (author) / Ataka, M. (author) / Fujita, H. (author) / Basrour, S. (author) / Soumann, V. (author) / Labachelerie, M. (author) / Daniau, W. (author)

    Published in:

    Publication date :

    1998-01-01


    Size :

    3 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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