Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    The Business Behind Optical Lithography


    Contributors:

    Published in:

    Publication date :

    1998-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.36



    Simulation of optical lithography

    Erdmann, A. / Henke, W. / SPIE et al. | British Library Conference Proceedings | 1999


    Trends in Optical Lithography

    Mack, C. A. | British Library Online Contents | 1996



    A Roadmap for Optical Lithography

    Rothschild, M. | British Library Online Contents | 2010


    Super-resolution by nonlinear optical lithography

    Bentley, S.J. / Boyd, R.W. | IEEE | 2003