Study on fabrication of high aspect ratio MEMS microparts using a compact SR beamline
MICROSYSTEM TECHNOLOGIES ; 4 , 2 ; 61-63
1998-01-01
3 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist
British Library Online Contents | 1998
|A Novel High Aspect Ratio Technology for MEMS Fabrication Using Standard Silicon Wafers
British Library Conference Proceedings | 2003
|Low g Inertial Sensor based on High Aspect Ratio MEMS
British Library Conference Proceedings | 2005
|Fabrication technique for high-aspect-ratio gratings [3879-07]
British Library Conference Proceedings | 1999
|