Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Ultra High Pressure Sensor with MEMS Sensor Element Mounted on the Measurement Membrane Manufactured by MIM


    Contributors:

    Conference:

    WCX SAE World Congress Experience



    Publication date :

    2022-01-01


    Size :

    ALL-ALL



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English



    Ultra High Pressure Sensor with MEMS Sensor Element Mounted on the Measurement Membrane Manufactured by MIM

    Lee, DongYoung / Jeon, Myounggun / Lim, Seunggu | SAE Technical Papers | 2022



    Ultra-slim automotive acceleration sensor applied MEMS technology

    Isobe,Y. / Fukada,T. / Muto,H. et al. | Automotive engineering | 2005


    Ultra-Slim Automotive Acceleration Sensor Applied MEMS Technology

    Hiroshi, Muto / Fujino, Seiji / Fukada, Tsuyoshi et al. | SAE Technical Papers | 2005


    High Spatial Resolution MEMS Surface Pressure Sensor Array for Transonic Compressor IGV Measurement

    Leger, T. / Johnson, D. / Wolff, M. et al. | British Library Conference Proceedings | 2001