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    Title :

    New MEMS Process Technology for Pressure Sensors Integrated with CMOS Circuits


    Contributors:

    Conference:

    SAE 2014 world congress and exhibition ; 2014 ; Detroit, MI



    Publication date :

    2014-01-01


    Size :

    321 pages


    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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