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    Title :

    Objective Function and ADjoint Sensitivities for Moving-Mask Lithography



    Conference:

    Multidisciplinary analysis and optimization conference; AIAA/ISSMO ; 2008 ; Victoria, Canada



    Publication date :

    2008-01-01


    Size :

    19 pages


    Remarks:

    Includes bibliographical references and index



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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