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    Titel :

    Objective Function and ADjoint Sensitivities for Moving-Mask Lithography



    Kongress:

    Multidisciplinary analysis and optimization conference; AIAA/ISSMO ; 2008 ; Victoria, Canada



    Erscheinungsdatum :

    2008-01-01


    Format / Umfang :

    19 pages


    Anmerkungen:

    Includes bibliographical references and index



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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