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    Title :

    MEMS-Foundry Technology for High-Performance Gyroscopes



    Conference:

    Symposium, Gyro technology ; 2007 ; Karlsruhe, Germany



    Publication date :

    2007-01-01


    Size :

    3 pages



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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