The Silicon Oscillating Accelerometer: A High-Performance MEMS Accelerometer for Precision Navigation and Strategic Guidance Applications
61st:; Annual meeting, Institute of Navigation ; 2005 ; Cambridge, MA
2005-01-01
10 pages
Held on CD-ROM
Conference paper
English
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
An All-Silicon Comb-Tooth Capacitive MEMS Accelerometer
Springer Verlag | 2022
|Optimization of MEMS capacitive accelerometer
British Library Online Contents | 2013
|