Design and Fabrication of Vertical Light Source Array Using 45 Degree Tilted Single Crystalline Silicon Micromirrors
INTERNATIONAL CONFERENCE, Optical MEMS and their applications ; 2004 ; Takamatsu, Japan
2004-01-01
2 pages
Conference paper
English
Optical MEMS , IEEE , LEOS
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MOEMS Electrostatic Scanning Micromirrors Design and Fabrication
British Library Conference Proceedings | 2002
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