Excimer laser annealing of ferroelectric SrBi~2Ta~2O~9 thin films prepared by metal organic chemical vapor deposition [5662-70]
International symposium; 5th, Fifth international symposium on laser precision microfabrication ; 2004 ; Nara, Japan
2004-01-01
6 pages
Also known as LPM 2004.
Conference paper
English
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Pulsed excimer lasers for thin film applications [5662-105]
British Library Conference Proceedings | 2004
|British Library Conference Proceedings | 1997
|British Library Conference Proceedings | 2004
|Laser machinable glass [5662-06]
British Library Conference Proceedings | 2004
|Excimer-laser-induced chemical vapor deposition of diamond films [2897-597]
British Library Conference Proceedings | 1996
|