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    Title :

    Excimer laser annealing of ferroelectric SrBi~2Ta~2O~9 thin films prepared by metal organic chemical vapor deposition [5662-70]



    Conference:

    International symposium; 5th, Fifth international symposium on laser precision microfabrication ; 2004 ; Nara, Japan



    Publication date :

    2004-01-01


    Size :

    6 pages


    Remarks:

    Also known as LPM 2004.




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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