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    Titel :

    Excimer laser annealing of ferroelectric SrBi~2Ta~2O~9 thin films prepared by metal organic chemical vapor deposition [5662-70]



    Kongress:

    International symposium; 5th, Fifth international symposium on laser precision microfabrication ; 2004 ; Nara, Japan



    Erscheinungsdatum :

    2004-01-01


    Format / Umfang :

    6 pages


    Anmerkungen:

    Also known as LPM 2004.




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Pulsed excimer lasers for thin film applications [5662-105]

    Delmdahl, R. / SPIE / Japan Laser Processing Society et al. | British Library Conference Proceedings | 2004


    Ferroelectric SrBi~2Ta~2O, thin films made by one- and two-step metalorganic chemical vapor deposition [3008-44]

    Li, T. / Stall, R. A. / Zhu, Y. et al. | British Library Conference Proceedings | 1997


    Formation of polycrystalline-silicon-germanium films by pulsed laser-induced rapid annealing [5662-69]

    Watakabe, H. / Sameshima, T. / Kanno, H. et al. | British Library Conference Proceedings | 2004


    Laser machinable glass [5662-06]

    Koyo, H. / Shojiya, M. / Tsunetomo, K. et al. | British Library Conference Proceedings | 2004


    Excimer-laser-induced chemical vapor deposition of diamond films [2897-597]

    Ren, D. / Hu, X. / Liu, F. et al. | British Library Conference Proceedings | 1996