Thickness and composition monitoring of thin layers of InGaAs in InP/InGaAsP epitaxial growths using FESEM and integrated SIMS profiles
6th, International conference on applications of photonic technology; closing the gap between theory, development, and application ; 2003 ; Quebec City, Canada
2003-01-01
7 pages
Also known as ICAPT 2003
Conference paper
English
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