Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    One-Step Maskless Microfabrication of Hybrid Microlens by Use of Focused Ion Beam Directly Milling



    Conference:

    Topical meeting; 6th, Diffractive optics and micro-optics ; 2002 ; Tucson, AZ



    Publication date :

    2002-01-01


    Size :

    6 pages


    Remarks:

    Also known as DOMO; Includes bibliographical references and index



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Laser microfabrication of photoresist rod array using a microlens array

    Matsuo, S. / Miyamoto, T. / Tomita, T. | IEEE | 2005


    Microlens arrays formed by melting photoresist and ion beam milling [3276-27]

    Yi, X.-J. / Zhang, X.-Y. / Li, Y. et al. | British Library Conference Proceedings | 1998



    Fabrication of microlens arrays by reactive ion milling [2687-19]

    Sankur, H. O. / Hall, R. L. / Motamedi, M. E. et al. | British Library Conference Proceedings | 1996


    A dual step precision multi-DOF stage for maskless digital lithography

    Ihn, Y. S. / Ji, S. H. / Moon, H. et al. | British Library Online Contents | 2012