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    Title :

    Optical Microelectromechanical Systems (OMEMS) Based on Silicon-on-Insulator (SOI) Technology


    Contributors:
    Noell, W. (author) / Clerc, P.-A. (author) / Guldimann, B. (author) / Schurmann, G. (author) / Staufer, U. (author) / de Rooij, N. (author) / Herzig, H. P. (author) / Manzardo, O. (author) / Dandliker, R. (author) / Marxer, C. (author)

    Conference:

    Topical meeting; 6th, Diffractive optics and micro-optics ; 2002 ; Tucson, AZ



    Publication date :

    2002-01-01


    Size :

    3 pages


    Remarks:

    Also known as DOMO; Includes bibliographical references and index



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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