Optical Microelectromechanical Systems (OMEMS) Based on Silicon-on-Insulator (SOI) Technology
Topical meeting; 6th, Diffractive optics and micro-optics ; 2002 ; Tucson, AZ
2002-01-01
3 pages
Also known as DOMO; Includes bibliographical references and index
Aufsatz (Konferenz)
Englisch
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