Silicon Based Vibration Sensors For Microelectromechanical Systems
9th, International Conference on Smart Materials, Structures and Systems ; 1999 ; Bangalore, India
01.01.1999
6 pages
in conjunction with the ninth National Seminar on Aerospace Structures; Includes bibliographical references and index
Aufsatz (Konferenz)
Englisch
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MicroElectroMechanical Systems
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