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    Title :

    Fabrication technology for micromachined spatial light modulators [4944-26]



    Conference:

    Conference, Integrated optical devices: fabrication and testing ; 2002 ; Brugge, Belgium



    Publication date :

    2003-01-01


    Size :

    8 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 4944

    DataCite | 1940


    Fabrication of photonic crystal waveguide elements on SOI [4944-03]

    Yliniemi, S. / Aalto, T. T. / Heimala, P. et al. | British Library Conference Proceedings | 2003


    Phase grating fabrication in glass via ion implantation [4944-21]

    Banyasz, I. / Fried, M. / Ducso, C. et al. | British Library Conference Proceedings | 2003


    SiON technology for integrated optical sensors (Invited Paper) [4944-23]

    Lambeck, P. V. / Worhoff, K. / International Society for Optical Engineering | British Library Conference Proceedings | 2003


    Optimal design of waveguiding periodic structures [4944-53]

    Diana, R. / Giorgio, A. / Perri, A. G. et al. | British Library Conference Proceedings | 2003