Fabrication technology for micromachined spatial light modulators [4944-26]
Conference, Integrated optical devices: fabrication and testing ; 2002 ; Brugge, Belgium
01.01.2003
8 pages
Aufsatz (Konferenz)
Englisch
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DataCite | 1940
Fabrication of photonic crystal waveguide elements on SOI [4944-03]
British Library Conference Proceedings | 2003
|Phase grating fabrication in glass via ion implantation [4944-21]
British Library Conference Proceedings | 2003
|SiON technology for integrated optical sensors (Invited Paper) [4944-23]
British Library Conference Proceedings | 2003
|Fabrication and characterization of waveguide structures on SOI (Invited Paper) [4944-22]
British Library Conference Proceedings | 2003
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