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    Titel :

    SiON technology for integrated optical sensors (Invited Paper) [4944-23]



    Kongress:

    Conference, Integrated optical devices: fabrication and testing ; 2002 ; Brugge, Belgium



    Erscheinungsdatum :

    2003-01-01


    Format / Umfang :

    10 pages




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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    Nr. 4944

    DataCite | 1940


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