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    Title :

    Thermal stimulation of laser processing of Si [4830-29]


    Contributors:
    Okada, N. (author) / Togawa, R. (author)

    Conference:

    Symposium; 3rd, Laser precision microfabrication ; 2002 ; Osaka, Japan



    Publication date :

    2003-01-01


    Size :

    4 pages


    Remarks:

    Also known as LPM 2002. Held as part of the 3rd international congress on laser advanced materials processing (LAMP 2002); See also shelfmark 7971.44727 No 50 2003 for further selected papers



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 4830

    DataCite | 1938


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