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    Titel :

    Thermal stimulation of laser processing of Si [4830-29]


    Beteiligte:
    Okada, N. (Autor:in) / Togawa, R. (Autor:in)

    Kongress:

    Symposium; 3rd, Laser precision microfabrication ; 2002 ; Osaka, Japan



    Erscheinungsdatum :

    2003-01-01


    Format / Umfang :

    4 pages


    Anmerkungen:

    Also known as LPM 2002. Held as part of the 3rd international congress on laser advanced materials processing (LAMP 2002); See also shelfmark 7971.44727 No 50 2003 for further selected papers



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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    Nr. 4830

    DataCite | 1938


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    Wang, Z. B. / Hong, M. H. / Lu, Y. F. et al. | British Library Conference Proceedings | 2003


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