Fabrication of microchannels by UV laser ablation [4830-38]
Symposium; 3rd, Laser precision microfabrication ; 2002 ; Osaka, Japan
2003-01-01
4 pages
Also known as LPM 2002. Held as part of the 3rd international congress on laser advanced materials processing (LAMP 2002); See also shelfmark 7971.44727 No 50 2003 for further selected papers
Aufsatz (Konferenz)
Englisch
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DataCite | 1938
Femtosecond laser ablation of Cr-SiO~2 binary mask [4830-121]
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|Thermal stimulation of laser processing of Si [4830-29]
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|Microdrilling of PCB substrate using DPSS third-harmonic laser [4830-23]
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