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    Title :

    Infrared spectroscopic ellipsometry for nondestructive characterization of free-carrier and crystal-structure properties of group-III-nitride semiconductor device heterostructures [4449-08]


    Contributors:
    Schubert, M. (author) / Kasic, A. (author) / Figge, S. (author) / Diesselberg, M. (author) / Einfeldt, S. (author) / Hommel, D. (author) / Kohler, U. (author) / As, D. J. (author) / Off, J. (author) / Kuhn, B. (author)

    Conference:

    Conference; 2nd, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2001 ; San Diego, CA



    Publication date :

    2001-01-01


    Size :

    11 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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