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    Title :

    Micomachining of SiC by Femtosecond Laser Ablation


    Contributors:
    Aoki, N. (author) / Sugioka, K. (author) / Obata, K. (author) / Akane, T. (author) / Takahashi, T. (author) / Cho, S. H. (author) / Kumagai, H. (author) / Toyoda, K. (author) / Midorikawa, K. (author) / InterOpto

    Conference:

    Pacific Rim conference; 4th, Lasers and electro-optics; CLEO/Pacific Rim 2001 ; 2001 ; Chiba, Japan



    Publication date :

    2001-01-01


    Size :

    II-286-287


    Remarks:

    Held with InterOpto2001. IEEE cat no 01TH8557



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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