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    Title :

    Preparation of In~2O~3 and ITO Films Using Coating Photolysis Process with ArF Excimer Laser


    Contributors:
    Tsuchiya, T. (author) / Watanabe, A. (author) / Niino, H. (author) / Yabe, A. (author) / Yamaguchi, I. (author) / Manabe, T. (author) / Kumagai, T. (author) / Mizuta, S. (author) / InterOpto / IEEE

    Conference:

    Pacific Rim conference; 4th, Lasers and electro-optics; CLEO/Pacific Rim 2001 ; 2001 ; Chiba, Japan



    Publication date :

    2001-01-01


    Size :

    I-54-55


    Remarks:

    Held with InterOpto2001. IEEE cat no 01TH8557



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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