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    Title :

    Integration possibilities with MOEMS/MEMS devices and packaging technologies using a MEMS simulation tool [4290-16]



    Conference:

    Conference; 5th, Optoelectronic integrated circuits and packaging ; 2001 ; San Jose, CA



    Publication date :

    2001-01-01


    Size :

    12 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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