Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Trends in optical design of projection lenses for UV and EUV lithography [4146-02]



    Conference:

    Conference, Soft x-ray and EUV imaging systems ; 2000 ; San Diego, CA



    Publication date :

    2000-01-01


    Size :

    12 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Illumination optics design for EUV lithography [4146-03]

    Antoni, M. / Singer, W. / Schultz, J. et al. | British Library Conference Proceedings | 2000


    Nr. 4146

    DataCite | 1925


    Mirror substrates for EUV lithography: progress in metrology and optical fabrication technology [4146-04]

    Dinger, U. / Eisert, F. / Lasser, H. et al. | British Library Conference Proceedings | 2000


    Laser-generated water plasma source for extreme-ultraviolet lithography and at-wavelength interferometry [4146-11]

    Constantinescu, R. C. / Jonkers, J. / Hegeman, P. et al. | British Library Conference Proceedings | 2000


    High-resolution soft x-ray microscopy [4146-24]

    Chao, W. / Anderson, E. H. / Denbeaux, G. et al. | British Library Conference Proceedings | 2000