In-situ ellipsometric measurements of thin film aluminum oxidation [4099-26]
Conference, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2000 ; San Diego, CA
2000-01-01
10 pages
Conference paper
English
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
DataCite | 1924
Fast-scanning ellipsometry for thin film characterization [4099-39]
British Library Conference Proceedings | 2000
|Standardization in optics characterization (Invited Paper) [4099-14]
British Library Conference Proceedings | 2000
|Calibration requirements for identifying and sizing wafer defects by scanner measurements [4099-38]
British Library Conference Proceedings | 2000
|British Library Conference Proceedings | 2000
|