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    Title :

    Calibration tool for a CCD-camera-based vision system [4099-19]


    Contributors:
    Xu, G. (author) / Tan, S. L. (author) / Low, S. P. (author) / Heng, Y. S. (author) / Lai, W. C. (author) / Du, X. (author) / Al-Jumaily, G. A. / SPIE

    Conference:

    Conference, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2000 ; San Diego, CA



    Publication date :

    2000-01-01


    Size :

    12 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 4099

    DataCite | 1924


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    Stover, J. C. / Scheer, C. A. / SPIE | British Library Conference Proceedings | 2000


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    Ristau, D. / SPIE | British Library Conference Proceedings | 2000


    Ellipsometry: a sophisticated tool for optical metrology (Invited Paper) [4099-23]

    Azzam, R. M. A. / SPIE | British Library Conference Proceedings | 2000


    Fast-scanning ellipsometry for thin film characterization [4099-39]

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