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    Title :

    Hermetically Sealed On-Chip Packaging of MEMS Devices


    Contributors:

    Conference:

    European space components conference; ESCCON 2000 ; 2000 ; Noordwijk, Netherlands



    Publication date :

    2000-01-01


    Size :

    4 pages


    Remarks:

    Also known as ESCCON 2000



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





    Hermetically Sealed Compressor

    Holtzapple, Mark T. | NTRS | 1994


    Hermetically Sealed Actuator

    Ritchie, Robert | AIAA | 2003