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    Title :

    Polymer waveguide cointegration with microelectromechanical systems (MEMS) for integrated optical metrology [3276-11]



    Conference:

    Conference; 3rd, Miniaturized systems with micro-optics and micromechanics ; 1998 ; San Jose; CA



    Publication date :

    1998-01-01


    Size :

    11 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    MEMS-based diffractive optical-beam-steering technology [3276-07]

    Winick, D. A. / Duewer, B. / Chaudhury, S. et al. | British Library Conference Proceedings | 1998


    Nr. 3276

    DataCite | 1908


    Microelectromechanical Systems (MEMS)

    Ramesham, R. | NTRS | 1999


    Microelectromechanical systems (MEMS)

    Gabriel, K.J. | IEEE | 1997


    MicroElectroMechanical Systems (MEMS)

    Gabriel, K. J. / IEEE; Aerospace and Electronics Systems Society | British Library Conference Proceedings | 1997