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    Titel :

    Polymer waveguide cointegration with microelectromechanical systems (MEMS) for integrated optical metrology [3276-11]



    Kongress:

    Conference; 3rd, Miniaturized systems with micro-optics and micromechanics ; 1998 ; San Jose; CA



    Erscheinungsdatum :

    1998-01-01


    Format / Umfang :

    11 pages




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    MEMS-based diffractive optical-beam-steering technology [3276-07]

    Winick, D. A. / Duewer, B. / Chaudhury, S. et al. | British Library Conference Proceedings | 1998


    Nr. 3276

    DataCite | 1908


    MicroElectroMechanical Systems (MEMS)

    Gabriel, K. J. / IEEE; Aerospace and Electronics Systems Society | British Library Conference Proceedings | 1997


    Fiber optic MEMS pressure sensors based on evanescent field interaction [3276-31]

    Tabib-Azar, M. / Sutapun, B. / Glawe, D. et al. | British Library Conference Proceedings | 1998


    Nonsilicon micromachining for MOEMS elements [3276-28]

    Chen, Y.-X. / Zhao, X.-L. / Wang, Z.-G. et al. | British Library Conference Proceedings | 1998