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    Title :

    Investigation of the resolution limit of the hydrogen plasma-induced defect layer intermixing process


    Contributors:
    Saher Helmy, A. (author) / Ooi, B. S. (author) / Marsh, J. H. (author)

    Conference:

    Topical meeting, Integrated photonics research ; 1996 ; Boston; MA



    Publication date :

    1996-01-01


    Size :

    4 pages



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English