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    Title :

    Fabrication of microlenses by combining silicon technology, mechanical micromachining and plastic molding [2687-03]


    Contributors:

    Conference:

    Conference, Miniaturized systems with micro-optics and micromechanics ; 1996 ; San Jose; CA



    Publication date :

    1996-01-01


    Size :

    5 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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    Goering, R. / Possner, T. / Schreiber, P. et al. | British Library Conference Proceedings | 1996


    Realizing micro-opto-electro-mechanical devices through a commercial surface-micromachining process (Invited Paper) [2687-05]

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    Nr. 2687

    DataCite | 1897


    Fabrication of microlens arrays by reactive ion milling [2687-19]

    Sankur, H. O. / Hall, R. L. / Motamedi, M. E. et al. | British Library Conference Proceedings | 1996


    Optical network of silicon micromachined sensors [2687-10]

    Wilson, M. L. / Burns, D. W. / Zook, J. D. et al. | British Library Conference Proceedings | 1996