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    Title :

    ArF and KrF excimer lasers with long lifetime: a status report [2380-33]



    Conference:

    Conference, UV and visible lasers and laser crystal growth ; 1995 ; San Jose; CA



    Publication date :

    1995-01-01


    Size :

    12 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 2380

    DataCite | 1891


    Ultracompact diode-pumped solid state lasers [2380-18]

    Hays, A. D. / Witt, G. / Martin, N. et al. | British Library Conference Proceedings | 1995


    New phase-shifting technique for deep UV excimer laser based lithography [2380-31]

    Bor, Z. / Cavallaro, J. R. / Erdelyi, M. et al. | British Library Conference Proceedings | 1995


    Compact, solid state, green, blue, and ultraviolet lasers [2380-13]

    Trail, J. A. / Nightingale, J. L. / Johnson, J. K. et al. | British Library Conference Proceedings | 1995


    Electron-vibrational relaxation of the XeF(B,C) excimer in the mixture with rare gases [2380-47]

    Akopian, M. E. / Bibinov, N. K. / Koch, D. B. et al. | British Library Conference Proceedings | 1995